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File:First mems device.jpg

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    Original file (434 × 366 pixels, file size: 116 KB, MIME type: image/jpeg)

    Summary

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    File information
    Description

    Figure of first MEMS device from U.S. patent 3413573

    Source

    U.S. Patent 3413573

    Date

    1968-11-26

    Author

    H.C. Nathanson et al

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    PD-US Public domain in the United States //en.wikipedia.org/wiki/File:First_mems_device.jpg

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    File history

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    Date/TimeThumbnailDimensionsUserComment
    current20:31, 25 December 2010Thumbnail for version as of 20:31, 25 December 2010434 × 366 (116 KB)MarcMedia (talk | contribs)Different format
    20:25, 25 December 2010Thumbnail for version as of 20:25, 25 December 2010434 × 366 (183 KB)MarcMedia (talk | contribs)Thumbnail was not created during original upload
    20:15, 25 December 2010Thumbnail for version as of 20:15, 25 December 2010434 × 366 (183 KB)MarcMedia (talk | contribs){{Information |Description = Figure of first MEMS device from U.S. patent 3413573 |Source = U.S. Patent Office |Date = 1968-11-26 |Author = H.C. Nathanson et al }}

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